Crystal Orientation Measuring Units

SU Series

Crystal Orientation Measuring Units
(Model SU-002)

High-precision measurement by unique angle measuring mechanism.

V-notch crystal face orientations and ingot axis orientations of single-crystal ingots (Si, GaAs, GaP, InP and InSb) and other orientations are measured at a high precision. Other types of unit are available for inspecting appearances, shapes, weights and other parameters of ingots simultaneously.

The units are serialized in accordance with applications.

SU Series

Model

Inspection Target

Measurement Item

Application

SU-001

Ingots

V-notch (orientation flat face) orientation

This unit is equipped with an external cylindrical grinding machine for V-notch machining to decide V-notch orientation.

Measurement accuracy:

Work size: 4 to 12"

SU-002

Ingots

Cut face orientation
(Axial orientation)

Axial orientation is measured when an ingot is sliced into wafers by a wire saw.

Measurement accuracy:

Work size: 6 to 12"

SU-003

Wafers

V-notch (orientation flat face) orientation
Cut face orientation (Axial orientation)

Wafer cut face orientation and inclination between V-notch orientation and specified crystal face are measured and acceptable or non-acceptable is decided after comparison with standard values.

Measurement accuracy:

Work size: 4 to 12"

SU-005

Ingots

V-notch (orientation flat face) orientation
Cut face orientation (Axial orientation)
Appearance, shape and weight

Axial orientation is measured when an ingot is sliced into wafers by a wire saw after V-notch machining . V-notch shapes, depths, crystal orientation, ingot cracks, scratches, dimensions after cutting, diameter and weight are measured while axial orientation is measured.

Measurement accuracy:

1' (cut face)

3' (V-notch)

SU-020

Ingots

V-notch (orientation flat face) orientation
Cut face orientation (Axial orientation)

Axial orientation and V-notch crystal orientation are measured simultaneously when an ingot is sliced into wafers by a wire saw after V-notch machining.
(Axial orientation is calculated by measuring a side face only. Provisional Patent Publication 1999-94772. Patent applied for)

Measurement accuracy:

1' (cut face)

3' (V-notch face)

Functions and Features

	High-precision angle measurement High-precision in linearity and reproducibility in angle measurement is achieved by a unique angle measuring mechanism and high-precision mechanism.
	Stable performance over long time The mechanism units feature high stiffness and durability and parts are processed sufficiently to remove internal stresses on the material level, assuring stable performance over a long time.
	Unique X-ray profile peak detection function A unique X-ray profile peak detection function that fully utilizes a statistic-processing technology is used, assuring high-precision and stable angle measuring performance.
	High-speed measurement The 2- and 4-orientation measuring functions reduce measuring time to about half compared with 4-orientation measurement. (Model SU-001 does not have this feature.) 2-orientation measurement calculates X and Y inclinations of crystal orientation by means of a strict solution utilizing spherical geometry. For this reason, calculations can be made at the same accuracy as that in 4-orientation measurement.(Provisional Patent Publication 1999-64252. Patent applied for)
	Unique X-ray dose measuring system The X-ray dose measuring system reduces error causes such as scattering using a pulse height analyzer and measures by selecting the characteristic X-rays of Cu, allowing high-precision measurement.
	High-sensitivity detector is used The X-ray tube and detector, which are the most important components, are manufactured by Toshiba. The detector has an extremely high sensitivity to the X-ray (K of Cu) to be detected. Because this detector is a proportional counter, the detection sensitivity of it relative to the incident position and direction of X-rays fluctuates less, allowing stable measurement against fluctuations of the inclination angle of a crystal face.
	Long life The X-ray tube is a life component that greatly affects the running cost. A large-capacity X-ray tube is used. A long life is achieved by lowering de-rating. (De-rating is 60% in tube voltage and 80% in tube current)
	Recording in variety of media Measurement data can be output and recorded in the following media (Model SU-001 does not have this feature.): Console, printer, HDD, FD and data transfer (option)
	Operability A function that allows manual operation for each unit function is provided for ease of adjustment and function checking. Parameters for internal arithmetic processing and other data are protected by a password to restrict operation to specified persons only. A personal computer for factory automation purposes is used to ensure reliability over many hours' operation.
	High safety-factor The unit comes complete with measures to prevent X-ray exposure and for safety. The X-ray exposure dose can be limited as the unit does not emit X-rays except during angle measurement.


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