TOSMICRON-Sseries

TOSMICRON-S series is a high performance X-ray inspection system providing clear images by the latest X-ray components. Functionality and reliability are improved by the software and basic mechanism common to all models.

TOSMICRON-S series realized excellent inspection efficiency by high-speed and high-accuracy mechanism, and various table feed function.

Adoption of high-speed, high-accuracy sample table

The sample table has high rigidity and accuracy. The inspection point can move even in the longest distance instantly and X-ray images can be displayed. Thanks to the high accuracy, the linear measuring function by the moving distance of the table and table auto-feeding allow higher inspection efficiency.

Sample table
(Can move in the longest distance instantly.)

Adjust the cross cursor to the starting point of measurement and move the table to the end point to measure the absolute distance.

Table auto-feed function(option)

This function allows automatic feed of the sample table under the preset conditions. Many samples put on the tray can be inspected in a certain pitch. Any inspection point on a board can be positioned automatically. Also, inspected images can be automatically saved and judgment results (NG, OK) can be entered, displayed, and saved.

<Main auto-feed function>

- Pitch feed for many trays (pitch between trays can be entered.)
- Random feed (inspection conditions at any inspection point can be registered.)
- Random pitch feed(a fixed pitch feed can be performed at each inspection point.)

Pitch feed for plural trays

Efficient inspection of the sample placed on the tray is possible. By input of pitch and number of each sample and each tray, automatic feed is possible.(In a right figure, 3 samples become 3 lines, and 2 trays become 2 lines.)

Example of IC inspection placed on plural trays.

Random pitch feed(option)

This function can set inspection point at random. Furthermore, this function also can perform fixed pitch feed from the inspection point. Therefore, it can possible to inspect solder joint of PCB mounted BGA efficiently.

Input of the condition of automatic-feed, storage of the judgment result

By table automatic-feed function, it can set following conditions.
- Image processing
- Effectiveness of automatic-feed
- The time of automatic-feed
- Yes or No of image saving, etc.

TOSMICRON-S series is in compact design, but they can get high magnification image. Because they have kept enough distance between X-ray generator and sensor.

FD type and IN type

TOSMICRON-S series can offer both FD type (Loaded with Flat Panel Detector) and IN type (Loaded with Image Intensifier). With FD type can be obtained distortion-free image, on the other hand with IN type can be obtained high-sensitive, high-contrast image. Both type could be offered to meet the inspection requirement from our customers.

High sensitive image by IN type (BGA)

Distortion-free image by FD type (BGA)

High magnification
(300 times)

Top class magnification can be obtained for closed tube micro focus. Especially with FD type (TOSMICRON-S4090FD), high magnification, clear image which is more than 300 times can be materialized.

Chip capacitor(0.6mm×0.3mm)

IC bonding wire
(300times image)

High quality tilted image

Tilted type (TOSMICRON-S5110IN) has adopted Synchro Tracking Method so it can keep magnification and constant brightness of X-ray image when the sensor is tilting.


Burned damage of IC bonding wire	Solder crack of mounted electronic component	Deficit of solder ball of multi chip module

Printing image attached incidental information

Format for printing is provided, which can print out X-ray image and its condition of inspection and image processing at the same time.

Image processing applications

Our various original software meet the needs of the customers.

Main function

- Integration / Averaging / Differential / Image filtering
- Image replay / Repositioning
- Measurement function (2 points / Wire sweep / Round / Angle / Die attach / void measurement )
- Profile / 3D display, etc.


Wire seep measurement of IC bonding		Differential processing


Die attach measurement		3D display ( Stereoscopic profile)

Other optional items for TOSMICRON-S series

- 2 axes manipulator
- Laser pointer
- Various sample table ( carbon, for heavy weight sample, etc.)

2 axes manipulator(With clipping the object, it can inspect by rotating and tilting.)

Side view image of IC with using the manipulator.

Features

Loaded with newly developed open tube X-ray generator. The life of filament is three times longer than that of our conventional model.
Loaded with high performance software which is common to TOSMICRON-S series and also loaded with high-speed and high-accuracy mechanism. Therefore, it is materialized both comfortable operability and high performance.
By tilting the sensor up to 60 degrees, it can get oblique image. Loaded with SYNCHRO TRACKING as a standard.
Can provide large table type(600X350mm).

Applicable field

High magnification for inspecting the IC and electronic components
Joint inspection for surface mounted devices
Inspection for small precision devices

Tracking of inspection point by SYNCHRO TRACKING

SYNCHRO TRACKING is an automatic tracking function which can track the inspection point to be a criteria when changing magnification and tilting angle. It can also get constant brightness even when tilting. With this function, smooth inspection is possible without missing the inspection point.


- Magnification can be constant because the mechanism moves to up and down direction and horizontal direction so the geometric condition does not change when sensor is tilting.		- The inspection point is never missed even if the mechanism goes up and down to change the magnification when tilting because the mechanism tracks to horizontal direction.

Image Example (BGA)

Conventional Tracking Method

Magnification and brightness are reduced when sensor is tilted.

Synchro Tracking Method

Even if sensor is tilted, magnification and brightness can be maintained.

Main specifications

X-ray generator	Open tube type, Maximum voltage: 110kV, Maximum current:200μA , Nominal focal spot size: 3μm
Sensor	4/2 Inches (Image Intensifier)
Maximum magnification (On table surface)	Approx. 450times
Tilting function	Tilting degree: 0 to 60°
Table size	X410mm×Y360mm(Effective inspection area 350×300mm) (Standard type) X600mm×Y350mm(Large type)
Outer dimensions (Main body)	W1150×H1670×D1430mm(Standard type)

Features

Can select Open tube type(S3000)and Closed tube type(S4000).
Loaded with high performance software, high-speed and high-accuracy mechanism, which are common to TOSMICRON-S series.
Can provide large table type (600×350mm).
The sensor can choose I.I. type and FPD type.
Improved reliability by mirror hard disks.

Applicable field

IC, electronic parts inspection
Solder inspection of mounted chips
Small precision parts inspection

Image example

IC bonding wire	Mounted chip capacitor

Main specifications

Model	S3110IN	S4090FD	S4090IN	S4130IN
X-ray generator	Open tube	Closed tube
X-ray capability	110kV, 3μm	90kV, 5μm		130kV, 5μm
Sensor	4/2inches I.I.	FPD	4/2inches I.I.
Table size	410×360mm(Effective inspection area 350×300mm)(Standard type) 600×350mm(Large table type)
Outer dimensions (Main body)	W1150×H1650×D1095mm	W1150×H1790×D1095mm

Loaded with sensor tilting and table rotation. This model can get stereoscopic X-ray image from multi angles. Also loaded with Micro focus X-ray generator whose minimum focal spot is 1µm, can get sharp image in case of high magnification inspection. This model is the most suitable for solder joint inspection and microstructure inspection of electronic parts.

Features

By tilting sensor up to maximum 60 degrees and rotating sample table, X-ray image from various angles can be obtained with high-speed, high-magnification.
Loaded with tracking function which can adjust not to miss the inspection point while tilting and rotating.
Loaded with a open tube X-ray which has maximum 160 kV tube voltage and 1μm focal spot size. This X-ray generator is easy to maintain because its power supply unit is unified with main body.
Loaded with high performance software, high-speed and high-accuracy mechanism, which are common to TOSMICRON-S series. It is compatible with comfortable operability with high performance.

Image example

Tilting image of solder ball of BGA	Tilting image of lead bump of LCD

Model

MODEL	TOSMICRON-S8160IN
X-ray generator	Open tube type , Maximum voltage: 160kV , Maximum current: 200 μA , Nominal focal spot size: 1μm
Sensor	4/2 inches I.I.
Maximum magnification	Approx. 730 times (On table surface)
Tilting / Rotating function	Sensor tilting 0° to 60°, Table rotation ± 180°
Table size	X350mm × Y300mm

TOSMICRON-S series